Custom Bilateral Multichannel Si Brain Probe

Custom Bilateral Multichannel Si Brain Probe Mfg service

We designs and manufactures Bilateral (double-sided) Multichannel Si Brain Probe, developed by use of T-MicroTec's proprietary 3DIC and MEMS process technology, for Brain Signal Recording / Stimulation. The Bilateral Multichannel Si Brain probe, named Neuronode100 series, integrates electrode sites on both Front and Back side for more effective signal recording and stimulation.


Specification :

Probe shaft material : Silicon (Si)

Electrode site material : Ir (Pt or Au optional)

Site diameter : 10, 15, 30 um or Custom

Probe thickness : 50 um or thicker

Probe length : 5, 10, 20, 33 mm or Custom

Probe width : 200 um (tapering)

Site number : Front 16 ch / Back 16 ch (Total 32 ch) or Custom

Site spacing : 50, 100, 200 um or Custom

Shank number : 1, 4 or Custom

Package : PCB / Implantable (Major system vendors compatible) or Custom


Custom Probe overview (example of 33 mm long) :

nn100-1 overview.jpg




- Probe length: 5, 10, 20, 33 mm or Custom

- TSV (Through Silicon Via) and Micro-Bump connection by advanced 3D IC and MEMS process technology.

- Precise alignment between front Si substrate and back Si substrate. 

- Micro-fabricated Si substrate with Ir electrode sites.

- Short width for localized measurement and minimization of tissue damage.

- Thin thickness ( less than 50 um) by unique Wafer thinning technology.


Electrode site design (exmaple of 16 ch) :

nn100-1 electorode design.jpg

















Note: Customizable of every probe parameter: dimension, length, thickness, electrode site location, shape and number, shank number, etc.


Bonding pad layout :


nn100-1 bonding pad layout.jpg














- Bonding pad layout on one side for general probe package. 


Probe Package :

Acute package example :

 nn100-1 probe package.jpg







 - Both Acute (PCB) and Chronic (Implantable) are available. All packages are compatible with major vendors' recording / stimulation system.


Availability :

Sample available for evaluation purpose.

Customization implemented so far : 2 cases

Download : Neuronode100 catalog

More info:


Product example : Neuronode100 - 4 shank



More info: